Hexamethyldisilazane-ElectronicGrade_907x620

Silazanes

Hexamethyldisilazane, Electronic Grade

SiVance Hexamethyldisilazane (Bis(trimethylsilyl)amine) (CAS No. 999-97-3) is a high purity trimethyl-terminated silylamine. 

Hexamethyldisilazane is widely used to promote adhesion of photoresists to semiconductor wafers.
  • Electronics:

  • Semiconductors